On Friday, February 20th Faculty of Life Science Department of Life Science in Applied Chemistry CourseProfessor Shunsuke Kono The second Research and Development Promotion Committee meeting was held regarding industry-academia collaborative research aimed at accelerating semiconductor manufacturing, in which [the organization] is participating.
This research project was selected for the Small and Medium Enterprise Agency's FY2025 Growth-Oriented Research and Development Support Program for Small and Medium Enterprises (commonly known as the Go-Tech Program), and is planned to be implemented over a three-year period starting this year. Its aim is to develop new technologies that will contribute to improving the performance of semiconductor devices and accelerating manufacturing processes.
On the day of the meeting, in addition to committee members from the research team, Sanwa Sangyo Co., Ltd. (Kudamatsu City, Yamaguchi Prefecture) and the Yamaguchi Prefectural Industrial Technology Center (Ube City, Yamaguchi Prefecture), observers were invited from the Organization for Small & Medium Enterprises and Regional Innovation, Japan (Minato Ward, Tokyo) and the Chugoku Bureau of Economy, Trade and Industry (Hiroshima City, Hiroshima Prefecture). The progress of the research and development was reported, and opinions were exchanged on how to promote future research.
The research and development project is titled "Development of a Novel Ti Anodic Oxidation Technology and Manufacturing Equipment Applicable to Semiconductor Manufacturing Equipment Components with Groundbreaking High-Speed Etching Capabilities." To address the challenge of uniform insulating film formation on metal surfaces, which is a problem when applying titanium (Ti) metal to electrostatic chuck cooling components used in semiconductor manufacturing equipment, we aim to establish a new fluorine-free Ti anodic oxidation technology and its industrialization.
Professor Kono is in charge of the research project "Elucidation of the mechanism involved in the formation of titanium anodic oxide films using fluorine-free electrolytes" as the implementing institution. By scientifically elucidating the anodic oxide film formation process using fluorine-free electrolytes, he will contribute to improving the reliability of the technology, ensuring stable industrialization, and advancing semiconductor manufacturing equipment.
The holding of this committee meeting at our university marks the official start of a three-year planned research and development project under the Go-Tech initiative, involving industry, government, and academia working together. This is expected to contribute to technological innovation and strengthen industrial competitiveness in the semiconductor field.
[Faculty of Life Science / Industry-Academia Co-innovation and Research Promotion Headquarters]
